EQ-9 LDLS

EQ-9 LDLS

High-Brightness, Long-Life, Broadband
Laser-Driven Light Source

Based on the highly successful Laser-Driven Light Source (LDLS)
technology, the EQ-9 offers the highest radiance and irradiance
available in a truly broadband white light source. The EQ-9 features a
compact lamp house, with clean construction that ensures long life and
ultimate stability. With a 170nm-2100nm wavelength range, and a choice of dual-beam
output or a single-beam output with retro-reflector, the EQ-9 is flexible for a broad variety of applications.

Researchers using light for imaging and analytical spectroscopy in a variety of applications in the life sciences and materials sciences need light sources capable of providing extreme high brightness and power across a broad wavelength range.

Features  &  Benefits

  • Radiance >10mW/mm².sr.nm (wavelength dependent)
       - Fastest measurements
  • Very low noise and excellent spatial stability
       - Precise & repeatable results
  • Dual beam output or higher-output single-beam (using integrated retroreflector) for flexibility
       - For optical flexibility
  • Compact lamphouse and clean construction
       - Long life and stability
  • Extreme high brightness across broad spectrum
       - UV-Vis-NIR (170nm – 2100nm)
  • Electrodeless operation
       - Long life and low cost of ownership

Industry Applications

  • Semiconductor Metrology & Inspection
  • Monochromator Source
  • UV-Vis-NIR Spectroscopy
  • Photoemission Electron Microscopy (PEEM)
  • Materials Characterization
  • Advanced Imaging
  • Thin Film Measurements

The Technology Behind LDLS™

Researchers using light for imaging and analytical spectroscopy in a variety of applications in the life sciences and materials sciences need light sources capable of providing extremely high brightness across a broad wavelength range. Traditionally, multiple lamps (Tungsten/Halogen, Xenon-arc, Deuterium) have been used to cover this broad spectral range. However, combining multiple lamps is costly and optically inefficient, and the use of electrodes within these lamps limits their ability to achieve the high brightness or power needed for the most demanding applications. Furthermore, traditional electrode-driven light sources have short life, need to be changed frequently, and during their life the lamp output declines constantly. To address this problem, Energetiq has developed a revolutionary single-light source technology called the LDLS™ Laser-Driven Light Source that enables extreme high brightness over a broad spectral range, from 170nm through visible and beyond, combined with lifetimes an order of magnitude longer than traditional lamps.


Energetiq's innovative LDLS technology uses a CW laser to directly heat a Xenon plasma to the high temperatures necessary for efficient deep ultraviolet production. In traditional approaches such as arc and deuterium lamps, the brightness, UV power, and lamp lifetime are limited by the use of electrodes to couple power to the plasma. The electrodeless LDLS technology creates small, high brightness plasma that allows efficient light collection, broad spectral range from the deepest UV through visible and beyond, and long lamp life.


*Patent Numbers:
US: 7435982; 7786455; 7989786; 8309943; 9048000; 9185786
Japan: 5410958; 5628253
Korea: 10-1507617
UK: GB2450045
OTHER PATENTS PENDING

LDLS  Products

EQ-99X

Compact, Economical, High Brightness, Broadband Light Source

EQ-99XFC

High Brightness, Broadband Light Source with Fiber-Coupled Output

EQ-99CAL

Broadband, High Brightness, Calibration Source

EQ-77

Extreme High Brightness, Broadband Light Source

EQ-400

Ultra-High Radiance, Broadband Light Source

EQ-9

Highest Radiance, Broadband Light Source
Product  Literature and Media


Video Demonstration of the
Award Winning EQ-99


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LDLS™ Products

EQ-99X

EQ-99XFC

EQ-99CAL

EQ-77

EQ-400

EQ-9

Selection Guide

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EUV/SXR Products

EQ-10

EQ-10HR

EQ-10HP

EQ-10SXR

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Semiconductor,
Flat Panel Displays
and Data Storage

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