Company recognized for manufacturing excellence
in EUV Light Source Technology
Woburn, MA – July 2, 2008 – Energetiq Technology, Inc., a developer and manufacturer of specialized short-wavelength light products for advanced technology applications, has been named a Best Product Winner for its EQ-10 Electrodeless Z-Pinch™ EUV Light Source in the annual Semiconductor International Editors’ Choice Awards competition. Energetiq was one of 20 companies honored for making a difference in semiconductor manufacturing.
“We are thrilled to accept this prestigious award in recognition of our advancements in EUV light source technology,” said Paul Blackborow, CEO of Energetiq Technology. “As EUV lithography infrastructure begins to take shape in the semiconductor manufacturing process, our EQ-10 model has proven to be the most stable and reliable source of EUV power needed for exacting metrology applications.”
The EQ-10 features Energetiq's proprietary Electrodeless Z-PinchTM technology and produces 10 Watts of stable EUV light, with low cost of ownership, for a variety of applications. The Energetiq electrodeless source design is proven to run continuously and have highly repeatable performance. The plasma size is below 500 microns in diameter under typical operating conditions and yields a 13.5nm EUV output of 10W (± 1% bandwidth) or 20W (± 3.5% bandwidth) into 2pi steradians with a controllable repetition rate up to 2 kHz.
The EQ-10 is installed at major EUV technology centers in the USA, Europe and Asia, and is used in advanced photoresist testing and qualification, EUV optics testing, EUV microscopy and EUV metrology.
The Editors’ Choice Best Products Awards is an annual contest hosted by Semiconductor International to reward products for the level of excellence needed to succeed in today’s semiconductor industry. The magazine will present the award to the winners at a special ceremony to be held during SEMICON West in San Francsico, July 16, 2008.