EQ-10SXR

Electrodeless Z-Pinch™
Soft X-Ray (SXR) Source

Soft x-rays (SXR) for water-window microscopy
and other applications have not readily been
available outside synchrotron facilities. Now, soft
x-rays can be produced in any research laboratory
at flux levels suitable for imaging and microprobing,
thanks to a new lab-scale source from Energetiq.

The Energetiq EQ-10SXR is a compact, easy-to-use,
reliable and cost-effective SXR light source system,
based on Energetiq’s unique Electrodeless Z-pinch™
technology using Nitrogen gas.

Features  &  Benefits

  • Unique Patented electrodeless design
       - Low debris / low consumable cost
  • 2-4nm Soft X-Rays produced using Nitrogen
       - Enables tabletop SXR microscope applications
  • Small plasma size
       - <1mm diameter for high brightness
  • Cost-effective and compact
       - Low cost per SXR Watt
       - Small footprint

Industry  Applications

  • Water-Window Microscopy
  • Microbeam Probing of Cells

The Energetiq EQ-10SXR source comprises a 19" rack containing the gas subsystems, power delivery subsystem, and control electronics; the electrodeless Z-pinch source assembly with its integrated vacuum pumping; and a high efficiency pulse modulator. This modular design allows easy integration to the microscope or other applications equipment.

The EQ-10SXR is capable of delivering up to 400 milliwatts of 2.8nm power into 2pi steradians and will run continuously at pulse repetition rates of up to 2kHz.

To accommodate the differing requirements of the various applications, the source operating conditions are user-adjustable. The light output can be optimized for peak power or for peak brightness as required by the user. Plasma size is typically below 1mm in diameter under typical operating conditions.

A simple and flexible optical interface is provided to the user on the front face of the electrodeless SXR source assembly to connect to the application equipment. Custom interfaces are available to meet specific customer requirements.

The user interface operates by a color touch screen display, and incorporates menus allowing manual and automatic operation.

The EQ-10SXR is easy to install, requiring only electrical power, a chilled water supply, clean dry compressed air and a supply of high purity Nitrogen.
EUV

• Unique design eliminates electrodes
   and electrode current
 
   - No electrodes – no electrode debris
 
• Plasma is magnetically confined
   away from source components
 
   - Reduces debris further
 
• Magnetic confinement offers
   unexcelled spatial stability
 
• Lower cost and complexity



*Patent Numbers:
US 7,307,375 -- US 7,948,185 -- DE 1774838 -- DE 2187711 -- GB 1774838 -- GB 2187711 -- JP 5179175 -- KR 10-1173324
NL 1774838 -- NL 2187711 -- US 8,143,790 -- US 7,199,384 -- US 7,183,717 -- US 7,569,791 -- US 8,019,043.

EUV  Products

EQ-10

High-Reliability, High-Stability 10 Watt EUV Source for EUV R&D

EQ-10HR

High-Repetition Rate, EUV Source for Accelerated Optics Testing

EQ-10HP

High-Brightness 20 Watt, EUV Source for Metrology and Testing

EQ-10SXR

Soft X-Ray Source for Water-Window Microscopy
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