Innovation Meets Illumination

A next-generation product, the EQX-850 LDLS builds on the success of previous models offering enhanced performance, user experience, and value.

The EQX-850 enables higher resolution metrology to meet the stringent demands of the leading-edge semiconductor processes with faster, more precise measurements, thanks to unmatched stability and brightness.

• Tool-To-Tool Matching: Ensures consistency across different tools and processes. Delivers uniform performance across all units.
• Stability & Brightness: Provides unrivaled short-term stability with higher spectral radiance, especially in the deep UV range.
• Improved Design: Features a modular crown for easy maintenance, eliminating the need for water cooling.
• Smart Features & Controls: Includes event logging for setup and troubleshooting, enhanced remote software interface controls, and performance monitoring to maintain optimal measurements.

Data Sheet