News

Read about our latest announcements, product launch information and event schedule.

Energetiq Technology Receives Semiconductor International Editors Choice Best Product Award

Company recognized for manufacturing excellence in EUV Light Source Technology

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Energetiq’s Laser-Driven Light Source Technology Enables Continuous Spectrum Light Sources, from Visible to Deep Ultraviolet

Woburn, MA – June 17, 2008 – Energetiq Technology, Inc., a developer and manufacturer of specialized short-wavelength light products for advanced technology applications, has..

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Energetiq EUV Light Source Installed on CEA-Leti Research Tool

Electrodeless Z-Pinch EUV System Used in Photoresist Outgassing Studies

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EUV Technology Integrates Energetiq EUV Source into New Tool for EUV Resist Outgassing and Reflectivity Measurements

Martinez, CA – February 26, 2007 – EUV Technology, has developed a tool for screening candidate EUV resist formulations for possible use in other EUV tools. The tool is integrated..

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Energetiq Receives Prestigious R&D 100 Award for its EQ-10 EUV Light Source

Woburn, MA – July 19, 2006 – Energetiq Technology, Inc. a developer and manufacturer of advanced short wavelength light products, is pleased to announce that R&D Magazine has..

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Albany NanoTech Enhances State-of-the Art Lithography Research with New EUV Source from Energetiq

Albany, NY – July 5, 2005 – Albany NanoTech, a leading global center for nanotechnology research, development and deployment, today announced the delivery of a new state of the..

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