Energetiq Technology Unveils the EQX-850: The Next Generation Laser-Driven Light Source for Advanced Semiconductor Metrology

EQX-850 LDLS builds on the success of previous models offering enhanced performance, user experience, and value

August 20, 2024 [Wilmington, MA] – Energetiq Technology, a global leader in broadband high-brightness light sources, is excited to announce the launch of its latest innovation, the EQX-850 Laser-Driven Light Source (LDLS®).

The next-generation LDLS platform is designed to empower semiconductor customers to meet the growing demands of 2 nm metrology and advanced process control. The platform has enhanced brightness, unrivaled output stability, and enables better tool-to-tool matching when compared to previous LDLS models. The EQX-850, the first product released on the new platform, has up to 5X the brightness and does not require water cooling. The EQX-850 enables higher-resolution metrology and meets the stringent demands of industry-leading semiconductor processes with faster, more precise measurements.

Key Features of the EQX-850 LDLS Include:

• Tool-To-Tool Matching: Ensures consistency across different tools and processes. Delivers uniform performance across all units.
• Stability & Brightness: Provides unrivaled short-term stability with higher spectral radiance, especially in the deep UV range.
• Improved Design: Features a modular crown for easy maintenance, eliminating the need for water cooling.
• Smart Features & Controls: Includes event logging for setup and troubleshooting, enhanced remote software interface controls, and performance monitoring to maintain optimal measurements.

Benefits for Semiconductor Metrology:

• Enables next-generation semiconductor device metrology with higher resolution for faster measurements.
• Reduces the total cost of ownership through easier bulb changes and faster preventive maintenance.
• Improves process controls with advanced on-board monitoring features and reduced unit-to-unit variability.
• Offers flexibility with multiple configurations to suit various applications.

"Our goal with the EQX-850 is to continue our leadership in the field of light sources for semiconductor process control," said Vikram Singh, PhD, General Manager of LDLS at Energetiq Technology. "This product not only improves upon our existing LDLS product excellence but also opens up new possibilities by enabling process control for the most advanced semiconductor nodes."

Visit www.energetiq.com/eqx-850 for more information.

ABOUT ENERGETIQ

Energetiq designs, develops, and manufactures ultra-bright broadband light sources for complex scientific and engineering applications. They have proudly served important industries like semiconductor manufacturing and life sciences for 20 years, providing light sources that generate high brightness from soft x-ray to infrared and beyond. To learn more about Energetiq’s rapid development and on-time delivery of long-lasting light sources, visit https://www.energetiq.com/.